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Enthalpy based modeling of pulsed excimer laser annealing for process simulation

✍ Scribed by M. Hackenberg; P. Pichler; K. Huet; R. Negru; J. Venturini; A. Pakfar; C. Tavernier; A. La Magna

Book ID
116245064
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
494 KB
Volume
258
Category
Article
ISSN
0169-4332

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