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Computational methods for the simulation of the excimer laser annealing in MOS technology

✍ Scribed by Antonino La Magna; Paola Alippi; G. Mannino; Vittorio Privitera; Guglielmo Fortunato; Luigi Mariucci; Marco Camalleri; Edouard Monakhov; Bengt Svensson

Book ID
108215106
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
148 KB
Volume
114-115
Category
Article
ISSN
0921-5107

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