Enhancing the Performance of Germanium Channel nMOSFET Using Phosphorus Dopant Segregation

✍ Scribed by Chen, Che-Wei; Tzeng, Ju-Yuan; Chung, Cheng-Ting; Chien, Hung-Pin; Chien, Chao-Hsin; Luo, Guang-Li; Wang, Pei-Yu; Tsui, Bing-Yue

• Book ID: 126475861
• Publisher: IEEE
• Year: 2014
• Tongue: English
• Weight: 401 KB
• Volume: 35
• Category: Article
• ISSN: 0741-3106
• DOI: 10.1109/LED.2013.2291774