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Enhanced resputtering and asymmetric interface mixing in W/Si multilayers

✍ Scribed by Christian Eberl, Tobias Liese, Felix Schlenkrich, Florian Döring…

Book ID: 120782706
Publisher: Springer
Year: 2013
Tongue: English
Weight: 815 KB
Volume: 111
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s00339-013-7587-5

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