Enhanced reliability in Si MOSFETs with channel lengths under 0.2 micron

✍ Scribed by Lindor Henrickson; Zezhong Peng; Jeffrey Frey; Neil Goldsman

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 390 KB
• Volume: 33
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(90)90030-i