Enhanced performance of a -IGZO thin-film transistors by forming AZO/IGZO heterojunction source/drain contacts

Systematic investigation on the effect o

Systematic investigation on the effect of contact resistance on the performance of a-IGZO thin-film transistors with various geometries of electrodes

✍ Lee, Jae Sang ;Chang, Seongpil ;Bouzid, Houcine ;Koo, Sang-Mo ;Lee, Sang Yeol 📂 Article 📅 2010 🏛 John Wiley and Sons 🌐 English ⚖ 287 KB

## Abstract We demonstrate the influence of the contact resistance on the electrical properties of a‐IGZO thin‐film transistors (TFTs) with ZrO~2~ gate insulator grown by rf‐magnetron sputtering at room temperature by adopting various channel widths and lengths. These TFTs have all been processed a