Surface protection of oxide circuit by p
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Y. Oshikubo; Y. Tarutani; H. Wakana; S. Adachi; Y. Ishimaru; K. Nakayama; T. Hat
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Article
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2006
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Elsevier Science
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English
โ 215 KB
Photosensitive polyimide was selected as a protection layer for the YBa 2 Cu 3 O 7รx circuits and stability of ramp-edge-junction characteristics against atmospheric moisture was investigated. Both coating and patterning of the protection layer could simultaneously be formed on the ramp-edge-junctio