Rare-earth oxide superlattices on Si(1&#
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Frank Grosse; Sergiy Bokoch; Steffen Behnke; Andre Proessdorf; Michael Niehle; A
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Article
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2011
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Elsevier Science
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English
⚖ 477 KB
Digital epitaxial rare-earth oxide layers are grown on Si(1 1 1) substrates by molecular beam epitaxy at substrate temperatures as low as 200 1C. It is demonstrated by X-ray diffraction and transmission electron microscopy that coherent digital layers form with an abrupt interface to the substrate.