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Energy harvesting using multilayer structure based on

✍ Scribed by Bo Ren; Yaoyao Zhang; Qinhui Zhang; Xiaobing Li; Wenning Di; Xiangyong Zhao; Haosu Luo; Siu Wing Or

Book ID
106022090
Publisher
Springer
Year
2010
Tongue
English
Weight
494 KB
Volume
100
Category
Article
ISSN
1432-0630

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Micromachined PZT cantilever based on SO
Micromachined PZT cantilever based on SOI structure for low frequency vibration energy harvesting
✍ Dongna Shen; Jung-Hyun Park; Joo Hyon Noh; Song-Yul Choe; Seung-Hyun Kim; Howard πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 600 KB

A PZT piezoelectric cantilever with a micromachined Si proof mass is designed and fabricated for a low frequency vibration energy harvesting application. The SiO 2 layer in the SOI wafer promotes accurate control of the silicon thickness that is used as a supporting layer in the cantilever beam stru