Energy Distribution of Positive Charges in Gate Dielectric: Probing Technique and Impacts of Different Defects

✍ Scribed by Hatta, Sharifah Wan Muhamad; Ji, Zhigang; Zhang, Jian Fu; Duan, Meng; Zhang, Wei Dong; Soin, Norhayati; Kaczer, Ben; De Gendt, Stefan; Groeseneken, Guido

• Book ID: 124094389
• Publisher: IEEE
• Year: 2013
• Tongue: English
• Weight: 927 KB
• Volume: 60
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/TED.2013.2255129