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Energy dependence of the secondary ion yield of metals and semiconductors

✍ Scribed by K. Wittmaack

Book ID
118981143
Publisher
Elsevier Science
Year
1975
Tongue
English
Weight
677 KB
Volume
53
Category
Article
ISSN
0039-6028

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The energy dependence of secondary ion yield is determined both by the (Sigmund-Thompson or Boltzmann type) energy distribution function of the secondary (neutral) particles and by the (exponential or power law) ionization probability. The combination of these functions results in four possible math