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Oxygen-concentration dependence of secondary ion yield enhancement

✍ Scribed by K. Wittmaack

Publisher
Elsevier Science
Year
1981
Weight
57 KB
Volume
112
Category
Article
ISSN
0167-2584

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The energy dependence of secondary ion yield is determined both by the (Sigmund-Thompson or Boltzmann type) energy distribution function of the secondary (neutral) particles and by the (exponential or power law) ionization probability. The combination of these functions results in four possible math