✦ LIBER ✦

Energy- and angular distributions of argon neutrals and their influence on etching profiles

✍ Scribed by K. Börnig; J. Janes; B. Jünemann

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

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✍ Zhou Qing; M.J.M. Beerlage; M.J. van der Wiel 📂 Article 📅 1982 🏛 Elsevier Science ⚖ 696 KB

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✍ R.A. Haring; H.E. Roosendaal; P.C. Zalm 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 965 KB