End-effects in cylindrical magnetron sputtering sources

• Book ID: 104265370
• Publisher: Elsevier Science
• Year: 1980
• Tongue: English
• Weight: 157 KB
• Volume: 30
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(80)80713-5

✦ Synopsis

the film morphology became discontinuous, leading to a welldeveloped island structure. Desorption energies of 0.33 eV on Al and sapphire and 0.40 eV on glass were obtained from the temperature dependence of the sticking fraction.