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Empirical potential for hydrocarbons for use in simulating the chemical vapor deposition of diamond films

✍ Scribed by Brenner, Donald W.

Book ID: 118036196
Publisher: The American Physical Society
Year: 1990
Tongue: English
Weight: 674 KB
Volume: 42
Category: Article
ISSN: 1098-0121
DOI: 10.1103/physrevb.42.9458

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## Abstract Lanthanum nickelate layers have been deposited onto 100 mm diameter silicon/silicon dioxide and (0001) sapphire substrates by liquid‐delivery metal–organic (MO) CVD using the precursors La(thd)~3~ and Ni(thd)~2~ (thd = 2,2,6,6‐tetramethyl‐3,5‐heptanedionato) dissolved in tetrahydrofuran