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Emission spectroscopy detection of N2active species in plasma nitriding process

✍ Scribed by A. Ricard; T. Belmonte; S. Bockel; H. Michel

Book ID: 110426732
Publisher: Springer
Year: 1998
Tongue: English
Weight: 375 KB
Volume: 48
Category: Article
ISSN: 0011-4626
DOI: 10.1023/a:1022870404219

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