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Ellipsometry study on refractive index profiles of the SiO2/Si3N4/SiO2/Si structure

✍ Scribed by Chao, Tien Sheng; Lee, Chung Len; Lei, Tan Fu

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Electroluminescence of Si-SiO2-Si3N4stru

✍ A. P. Baraban; D. V. Egorov; A. Yu. Askinazi; L. V. Miloglyadova 📂 Article 📅 2002 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 48 KB

Simulation of range profiles for boron i

✍ M. Posselt; T. Feudel; G. Thäter 📂 Article 📅 1990 🏛 Springer 🌐 English ⚖ 387 KB

Eutectic Studies in the System Si3N4-Si2

✍ F. F. LANGE 📂 Article 📅 1979 🏛 John Wiley and Sons 🌐 English ⚖ 376 KB

Low loss Si_3N_4–SiO_2 optical waveguide

✍ Henry, C. H. ;Kazarinov, R. F. ;Lee, H. J. ;Orlowsky, K. J. ;Katz, L. E. 📂 Article 📅 1987 🏛 The Optical Society 🌐 English ⚖ 509 KB

Dielectric function of Si-SiO2 and Si-Si

✍ Aspnes, D. E.; Theeten, J. B. 📂 Article 📅 1979 🏛 American Institute of Physics 🌐 English ⚖ 789 KB

Low loss Bragg reflectors on SiO_2–Si_3N

✍ Lee, H. J. ;Henry, C. H. ;Kazarinov, R. F. ;Orlowsky, K. J. 📂 Article 📅 1987 🏛 The Optical Society 🌐 English ⚖ 381 KB