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Ellipsometry on magnetooptic thin film multilayer systems

✍ Scribed by J. Kranz; Ch. Schrödter


Publisher
Springer
Year
1984
Tongue
English
Weight
372 KB
Volume
34
Category
Article
ISSN
0721-7269

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✍ Paul G. Snyder; Yi-Ming Xiong; John A. Woollam; Eric R. Krosche; Yale Strausser 📂 Article 📅 1992 🏛 John Wiley and Sons 🌐 English ⚖ 494 KB

## Abstract Samples of polycrystalline silicon (poly‐Si) thin‐film multilayers were prepared by low‐pressure chemical vapor deposition. Analysis of these samples by cross‐sectional transmission electron microscopy (XTEM) revealed large changes in grain size between the undoped–as‐deposited and dope