Ellipsometrical measurements to the optical constants of chromium films on glass substrates in the visible spectral range

✍ Scribed by Dr. K. Löschke

• Publisher: John Wiley and Sons
• Year: 1981
• Tongue: English
• Weight: 137 KB
• Volume: 16
• Category: Article
• ISSN: 0232-1300
• DOI: 10.1002/crat.19810160521

✦ Synopsis

For the fabrication of semiconductor intFgrated devices photo masks play an important role. This masks can be glass slices coated with chromium films or chromium/chromiumoxide films. To aspire to an optimum of the producing of the structured chromium-glass slices it is necessary to know the optical parameters and the thicknesses of the films as a function of the wavelength of light.

The Multiple-Angle-of-Incidence Ellipsometry (MAI) have been used in this work to