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Ellipsometric examination of ion-plated chromium films in the visible spectral range

✍ Scribed by E. Idczak; E. Oleszkiewicz; M. Tańcula


Publisher
Elsevier Science
Year
1980
Tongue
English
Weight
128 KB
Volume
72
Category
Article
ISSN
0040-6090

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Ellipsometrical measurements to the opti
✍ Dr. K. Löschke 📂 Article 📅 1981 🏛 John Wiley and Sons 🌐 English ⚖ 137 KB 👁 1 views

For the fabrication of semiconductor intFgrated devices photo masks play an important role. This masks can be glass slices coated with chromium films or chromium/chromiumoxide films. To aspire to an optimum of the producing of the structured chromium-glass slices it is necessary to know the optical