Ellipsometric measurements of surface roughness of silicon wafers: Kaminska, Anna Maria. Electron Technology (Warsaw). 1992; 25(1–4): 43–57

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 133 KB
• Volume: 16
• Category: Article
• ISSN: 0141-6359
• DOI: 10.1016/0141-6359(94)90066-3