Ellipsometric measurements of surface roughness of silicon wafers : Anna Maria Kaminska. Electron Technology, 25(1–4), 43 (1992)

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 95 KB
• Volume: 34
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(94)90271-2