✦ LIBER ✦

Ellipsometric investigations of (1 0 0) GaSb surface under chemical etching and sulfide treatment

✍ Scribed by E Papis; A Kudła; T.T Piotrowski; K Gołaszewska; E Kamińska; A Piotrowska

Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 131 KB
Volume: 4
Category: Article
ISSN: 1369-8001
DOI: 10.1016/s1369-8001(00)00116-5

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✦ Synopsis

Variable angle spectroscopic ellipsometry has been employed to study (1 0 0) GaSb surface under various chemical treatment providing information on the thickness, refractive index and dielectric function of residual oxides and intentionally formed sulfides. An evidence is given that etching and sulfide pretreatment in 1 M Na 2 S developed in this work enables to greatly enhance the quality of the GaSb surface and to reduce the thickness of residuals down to 0.8-1 nm. On the other hand, electrochemical treatment in 21% (NH 4 ) 2 S has been proved to be an efficient method of passivation of GaSb surface.

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Ellipsometric investigations of (1&#xa0;0&#xa0;0) GaSb surface under chemical etching and sulfide treatment

✦ Synopsis

Ellipsometric investigations of (1 0 0) GaSb surface under chemical etching and sulfide treatment