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Ellipsometric Investigation of Ag-Doping Profiles in Amorphous Chalcogenide Thin Films

✍ Scribed by Hönig, V. ;Fedorov, V. ;Libbmann, G. ;Süptitz, P.


Book ID
105379359
Publisher
John Wiley and Sons
Year
1986
Tongue
English
Weight
437 KB
Volume
96
Category
Article
ISSN
0031-8965

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Optical investigations of self-polarized PbZr 0.235 Ti 0.765 O 3 (PZT) films deposited onto Si/SiO 2 /adhesion layer/(111) Pt substrate by RF sputtering are presented in this work. Measurements were performed with a spectral ellipsometer working in rotating analyzer mode. To obtain the temperature d