Ellipsometric determination of optical constants for silicon and thermally grown silicon dioxide via a multi-sample, multi-wavelength, multi-angle investigation

✍ Scribed by Herzinger, C. M.; Johs, B.; McGahan, W. A.; Woollam, J. A.; Paulson, W.

• Book ID: 118209645
• Publisher: American Institute of Physics
• Year: 1998
• Tongue: English
• Weight: 479 KB
• Volume: 83
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.367101