Elemental dependence of angular ejection distributions of sputtered particles from an SiO2+5 wt.%P2O5 sintered composite target

✍ Scribed by T. Motohiro; Y. Taga

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 368 KB
• Volume: 189
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(90)90031-8