7486. Elemental dependence of angular ejections distributions of sputtered particles from an SiO2+5 wt% P2O5 sintered composite target: T Motohiro and Y Taga,Thin Solid Films, 189, 1990, 103–109

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 151 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)91554-2