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Elemental Composition of Reactively Sputtered Indium Nitride Thin Films

โœ Scribed by Kumar, Sunil; Mo, Li; Motlan, Motlan; Tansley, Trevor L.


Book ID
125545402
Publisher
Institute of Pure and Applied Physics
Year
1996
Tongue
English
Weight
846 KB
Volume
35
Category
Article
ISSN
0021-4922

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