Electrostatically actuated failure of microfabricated polysilicon fracture mechanics specimens

✍ Scribed by Kahn, H.; Ballarini, R.; Mullen, R. L.; Heuer, A. H.

• Book ID: 120148754
• Publisher: The Royal Society
• Year: 1999
• Tongue: English
• Weight: 761 KB
• Volume: 455
• Category: Article
• ISSN: 0962-8444
• DOI: 10.1098/rspa.1999.0478