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Electrons as “Invisible Ink”: Fabrication of Nanostructures by Local Electron Beam Induced Activation of SiOx

✍ Scribed by Marie-Madeleine Walz; Michael Schirmer; Florian Vollnhals; Thomas Lukasczyk; Hans-Peter Steinrück; Hubertus Marbach

Publisher: John Wiley and Sons
Year: 2010
Tongue: English
Weight: 625 KB
Volume: 49
Category: Article
ISSN: 0044-8249
DOI: 10.1002/anie.201001308

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