Experimental investigation into the use
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Anjam Khursheed; Sek Poh Goh
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Article
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1997
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Elsevier Science
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English
โ 955 KB
In the electron beam testing of integrated circuits, local transverse electric fields cause error to voltage measurements. Presently, the solution is to place a i-5 kV voltage extraction electrode a few millimetres above the specimen. An alternative method is to use a micro-extraction electrode that