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Electron swarm parameters in SiH4-rare gas mixtures and collision cross sections for monosilane molecules

✍ Scribed by Kurachi, M.; Nakamura, Y.

Book ID: 117861964
Publisher: IEEE
Year: 1991
Tongue: English
Weight: 719 KB
Volume: 19
Category: Article
ISSN: 0093-3813
DOI: 10.1109/27.106823

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