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Electron spin resonance study of hydrogenated microcrystalline silicon–germanium alloy thin films

✍ Scribed by C.W. Chang; T. Matsui; M. Kondo

Book ID
116670872
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
250 KB
Volume
354
Category
Article
ISSN
0022-3093

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Electron spin resonance in laser-crystal
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## Abstract The defect properties of laser‐crystallized polycrystalline silicon–germanium (Si–Ge) thin films on glass substrates were investigated with electron spin resonance (ESR) and conductivity measurements. The ESR measurements reveal that laser‐crystallized poly Si~1−__x__~Ge~__x__~ thin fil