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Electron spectroscopy studies on SiC films before and after hydrogen ion irradiation

โœ Scribed by Huang Ningkang; Yang Bing; Wang Dezhi

Book ID
105630077
Publisher
Wuhan University of Technology
Year
2005
Tongue
English
Weight
462 KB
Volume
20
Category
Article
ISSN
1000-2413

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## Abstract The effects of different processes of hydrogenation, thermal treatment and ion irradiation of hydrogenated polycrystalline diamond surface have been investigated by means of high resolution electron energy loss spectroscopy (HRโ€EELS). Analysis of the different contributions in the CH st