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Electron microscopy study of sputtered NbN films

✍ Scribed by H.L. Ho; R.T. Kampwirth; K.E. Gray; D.W. Capone II; L.S. Chumbley; M. Meshii

Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 869 KB
Volume: 22
Category: Article
ISSN: 0304-3991
DOI: 10.1016/0304-3991(87)90073-8

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