Electron-microscopical observation of early stages in the growth of autoepitaxial silicon films by hydrogen reduction of silicon tetrachloride: Y E Belousova et al, Electronic Technology, Scient Techn Collect, Control of Quality and Standardization, No 4, 1971, 3–7 (in Russian)

• Publisher: Elsevier Science
• Year: 1972
• Tongue: English
• Weight: 168 KB
• Volume: 22
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(72)91014-7