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Electron microscopic investigations of the working damage on garnet substrate surfaces

✍ Scribed by Dr. R. Hergt; H. Müller

Publisher
John Wiley and Sons
Year
1977
Tongue
English
Weight
597 KB
Volume
12
Category
Article
ISSN
0232-1300

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✦ Synopsis

Abstract

Surface morphology and working damage of gadolinium gallium garnet substrates prepared by various polishing methods were investigated by replica technique and RHEED. Surface roughness is found to be in the range below about a tenth of the polishing grain size. The remarkable influence of the polishing grain size on the RHEED pattern is investigated and a brittle fracture model for the abrasion process is suggested. The damaged layer thickness does not exceed the magnitude of the surface roughness. In the case of a mechano‐chemical polish surface roughness is in the order of magnitude of only few lattice cells and there could not be found any surface lattice damage.

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