Electron kinetics in a collision-dominated SiH4rf plasma including self-consistent rf field strength calculation

✍ Scribed by R. Winkler; M. Capitelli; C. Gorse; J. Wilhelm

• Publisher: Springer
• Year: 1990
• Tongue: English
• Weight: 835 KB
• Volume: 10
• Category: Article
• ISSN: 0272-4324
• DOI: 10.1007/bf01447201