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Attachment and ionization in a self-consistent treatment of the electron kinetics of a collision-dominated rf plasma

✍ Scribed by R. Winkler; M. Dilonardo; M. Capitelli; J. Wilhelm

Publisher: Springer
Year: 1987
Tongue: English
Weight: 972 KB
Volume: 7
Category: Article
ISSN: 0272-4324
DOI: 10.1007/bf01016516

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