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Electron kinetics and non-Joule heating in near-collisionless inductively coupled plasmas

โœ Scribed by Kolobov, V. I.; Lymberopoulos, D. P.; Economou, D. J.


Book ID
121432634
Publisher
The American Physical Society
Year
1997
Tongue
English
Weight
414 KB
Volume
55
Category
Article
ISSN
1063-651X

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