Electron-stimulated desorption total cro
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Aguilera, A. F.; Campbell, J. H.; Craig, J. H.; Pannell, K. H.
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Article
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1998
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John Wiley and Sons
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English
โ 274 KB
๐ 1 views
We have studied digermane-covered Si(100) using electron-stimulated desorption (ESD). Estimates are presented for the total H(a) ESD removal cross-section for digermane-exposed Si(100) substrates at 85 K using electrons incident at 150 eV energy. It is found that electron-enhanced deposition of Ge o