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Electron irradiation effects on digermane adsorbed on Si(100) surfaces

โœ Scribed by J.H Campbell; J Lozano; A.F Aguilera; J.H Craig Jr.; K.H Pannell


Book ID
108418362
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
194 KB
Volume
108
Category
Article
ISSN
0169-4332

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We have studied digermane-covered Si(100) using electron-stimulated desorption (ESD). Estimates are presented for the total H(a) ESD removal cross-section for digermane-exposed Si(100) substrates at 85 K using electrons incident at 150 eV energy. It is found that electron-enhanced deposition of Ge o