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Electron irradiation effects in edge-defined film-fed growth ribbon silicon

โœ Scribed by A.E. Jaworowski; G.S. Oehrlein; J.W. Corbett


Publisher
Elsevier Science
Year
1983
Weight
257 KB
Volume
116
Category
Article
ISSN
0378-4363

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Edge-defined film-fed grown polycrystalline silicon sheets are known to contain carbon impurities in a state of extremely high supersaturation. During very rapid growth, carbon is incorporated with an unusually high effective segregation coefficient close to unity; therefore it is of interest to stu