Electron impact ionization of the SiDx (x=1–3) free radicals
✍ Scribed by Tarnovsky, V.; Deutsch, H.; Becker, K.
- Book ID
- 120560814
- Publisher
- American Institute of Physics
- Year
- 1996
- Tongue
- English
- Weight
- 383 KB
- Volume
- 105
- Category
- Article
- ISSN
- 0021-9606
- DOI
- 10.1063/1.472484
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📜 SIMILAR VOLUMES
Total cross sections for electron impact ionization are necessary quantities for numerical modeling of plasma chemistry and for quantitative mass-spectrometric gas analysis. Theoretical cross sections for SF, SF 2 , SF 3 , SF 4 , and SF 5 are calculated by the recently developed binary-encounter-Bet
The energy dependence of the partial cross sections of electron-impact dissociation of SF, into the neutral radicals SF, SF, and SF, is measured from the threshold to 200eV. This measurement is accomplished by appearance mass spectrometry in a dual electron beam device. The dissociation products SF,