The energy dependence of the partial cross sections of electron-impact dissociation of SF, into the neutral radicals SF, SF, and SF, is measured from the threshold to 200eV. This measurement is accomplished by appearance mass spectrometry in a dual electron beam device. The dissociation products SF,
Electron-impact total ionization cross sections of SFx(x = 1–5)
✍ Scribed by M.Asgar Ali; Karl K Irikura; Yong-Ki Kim
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 136 KB
- Volume
- 201
- Category
- Article
- ISSN
- 1387-3806
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✦ Synopsis
Total cross sections for electron impact ionization are necessary quantities for numerical modeling of plasma chemistry and for quantitative mass-spectrometric gas analysis. Theoretical cross sections for SF, SF 2 , SF 3 , SF 4 , and SF 5 are calculated by the recently developed binary-encounter-Bethe (BEB) model. The BEB model combines a modified form of the Mott cross section and the Bethe cross section. The results are compared with experimental cross sections for SF 3 and SF 5 free radicals. In view of the success of the BEB method for SF 6 and many other molecules, it is expected that the results presented here will provide reliable total ionization cross sections for SF x ( x ϭ 1-5). (Int J Mass Spectrom 201 (2000) 187-195) © 2000 Elsevier Science B.V.
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