Back-Scattered Electron Imaging of Micro
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G. Lacayo; J. Wollweber; D. Schulz; W. Schröder; W. Neumann
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Article
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1999
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John Wiley and Sons
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English
⚖ 559 KB
Compositional inhomogeneities of (Si,Ge) single crystals grown by the radio frequency (RF) heated float zone technique have been studied using the back-scattered electron (BSE) mode of a scanning electron microscope. Numerical analysis of the images by Fast Fourier Transformation (FFT) showed that t