Electron cyclotron resonance plasma deposition as a promising technique for low-temperature hard coatings

✍ Scribed by MJ Hernandez; FJ Gomez; J Garrido; J Piqueras; C Gomez-Aleixandre

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 362 KB
• Volume: 45
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(94)90012-4