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Electron beam writing in fabricating planar high-Tc Josephson junctions

โœ Scribed by S. Tolpygo; B. Nadgorny; S. Shokhor; F. Tafuri; Y. Lin; A. Bourdillon; M. Gurvitch


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
338 KB
Volume
209
Category
Article
ISSN
0921-4534

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Fabrication of stable Nb-based Josephson
โœ S.Z. Wang ๐Ÿ“‚ Article ๐Ÿ“… 1987 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 208 KB

High quality Nb films with superconducting Tc'S of 9.3 K and residual resistance ratios of 3-5.5 have been fabricated by e-beam evaporation in an ordinary high vacuum system. Nb/Pb tunnel junctions of good quality (Vm ~ 13 mV,jc ~ 400 A cm -2) were prepared using an ion beam oxidation technique. The