Electron beam tester a tool for VLSI components analysis

✍ Scribed by Gérard Bourgeon

• Book ID: 104306169
• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 292 KB
• Volume: 7
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(87)80027-8

✦ Synopsis

The increasing complexity of VLSI components requires the use of more powerful tools to verify them. One of these tools, the electron beam tester can bring a new powerful help in various ways during the life of an integrated circuit.

The purpose of this paper is to present briefly CAMECA works about electron beam tester.