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Electron beam testability of monolithic microwave integrated circuits (MMIC)

✍ Scribed by Wolfgang Mertin; Klaus Dieter Herrmann; Erich Kubalek


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
400 KB
Volume
12
Category
Article
ISSN
0167-9317

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Semi-insulating liquid-incapsulated Czochralski GaAs wafers are generally used as substrates for the fabrication of monolithic microwave integrated circuits. In the fabrication process, the wafer is subjected to temperature cycling during the various stages of processing, namely post-ion implantatio