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Electron beam interactions with CO on W {100} studied by Auger electron spectroscopy

✍ Scribed by Michael Housley; David A. King

Book ID
118982074
Publisher
Elsevier Science
Year
1977
Tongue
English
Weight
534 KB
Volume
62
Category
Article
ISSN
0039-6028

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The inΓ‘uence of high-energy Si' irradiation on carbon-implanted silicon at low temperature was studied. C' Ions of kinetic energy 25 keV were implanted into Si(100) at room temperature with a dose density of 1 Γ‚ 1017 ions cm-2 after amorphization of the surface region by Ge' implantation at 200 keV.